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photronics
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Photronics/Photonics

Wafer Fabication

IC Assembly

Micromanipulator designs complete probing systems, providing our customers with a superior, integrated solution.
A wide range of system accessories provide the flexibility needed to address virtually any application requirement.

Product Index:


4060 150-200 mm Technical Manual Probe Station

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Features & Benefits

  • Easy to reach, backlash-free control knobs for stage, platen and microscope: Reduced user strain, efficient positioning and flexible test setup
  • Highly stable base: Rock-solid platform for precision probing
  • Clean, open design: Set up your application your way with space and flexibility
  • Large area platen: Use high pin count probe cards or multiple manipulators
  • Independent platen fine and coarse lift controls: Quick lift and precise Z control of previously positioned probes
  • Integrated thermal chuck wiring and plumbing:      Accurate/repeatable stage movement
  • Heavy duty microscope bridge: Supports heavy composite microscopes, laser cutters, and MEMS vibrometers. Ideal for FA-2000 emission microscopy.

 

Technical 200mm (8”) and 150mm (6”) manual station
Micromanipulator's Tech Series Probe Station, Model 4060 is designed to provide a quality 6-inch (150mm) or 8-inch (200mm) probe station at a cost effective price. It shares many of the most important features of the high performance model 8060 station including a vibration damping base, open design, microscope bridge and integrated thermal chuck connections. These stations provide the ease of use, stability and precision that you expect from a Micromanipulator probe station.

Ideally suited for general probing and laser cutter use, the Model 4060 manual station has stage control knobs which easily transverse an entire wafer and still provide precision positioning. The backlash free manual controls of the 4060 drive the stage directly and are easily accessed from the station front.

The large aluminum platen supports a large number of manipulators or high pin count probe cards (with optional probe card holder). The platen is moved to the platen down position by a precise control knob. A fast lift lever is used to raise and lower all manipulators and probe card simultaneously for stage X-Y moves. The platen is supported by solid four point support for superior stability and accuracy.

The 4060 features a super stable microscope bridge which can support high powered microscopes, laser cutters and Micro-Motion Analyzers. A microscope up lock is standard. Applications for the Tech Series include LCD probing, Probe Card probing, Reliability Testing, Thin Film probing, and Process Monitoring.

 

4000 Series Technical Probe Stations

450PM-A / B

Features & Benefits

  • Clean, open design: Set up your application your way with space and flexibility
  • Direct leadscrew stage drives: Backlash free precision stage motion
  • Large platen has ample space for multiple manipulators: Flexible setup and multiple site tests
  • Manual four-point platen fine Z adjustment: Precise raising and lowering of probes
  • Stable form factor: High stability for small geometry probing
  • Supports WAVE manipulators and VersiTile heads: Provides multiple contacts for high temperature tests

Technical manual station
Micromanipulator's 450PM Probe Station, is designed to provide a general purpose probe station at a super cost effective price. It shares many of the most important features of the model 4060 station including a vibration damping base, open design, large area platen with fine lift (A version) and integrated thermal chuck connections (A version). These stations provide the ease of use, stability and precision that you expect from a Micromanipulator probe station.

Ideally suited for general probing use, the Model 450PM manual station has stage control knobs which easily transverse an entire wafer and still provide precision positioning. The backlash free manual controls of the 450PM drive the stage directly and are easily accessed from the station front.

The large aluminum platen supports a large number of manipulators or high pin count probe cards (with optional probe card holder). The platen is moved to the platen down position by a precise control knob (A version) or fixed (B version). The platen control is used to raise and lower all manipulators and the probe card simultaneously for stage X-Y moves. The platen is supported by solid four point support for superior stability and accuracy.

The 450PM features a flexible boom stand which supports a stereo zoom microscope. Applications for the Tech Series include LCD probing, Probe Card probing, Reliability Testing, Thin Film probing, and Process Monitoring.


8000 Series High Performance Stations

8060 150 - 200mm High Performance Manual Probe Station

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Features & Benefits

  • Clean, open design: Set up your application your way with space and flexibility
  • Easy to reach, backlash-free control knobs for stage, platen and microscope: Reduced user strain, efficient positioning and flexible test setup
  • Low Current/Low Noise Ready: Easy setup of most demanding parametric tests
  • Highly stable base: Rock-solid platform for precision probing
  • Integrated thermal chuck wiring and plumbing: Accurate/repeatable stage movement
  • High speed and high precision X-Y stage knobs: For fast movement and precise positioning on the wafer
  • Large area magnetic stainless steel platen: Supports probe cards or high count multiple individual manipulators
  • Manual four-point platen fine Z adjustment: Precise raising and lowering of probes
  • Platen fast lift lever with microscope lift: Raises and lowers the microscope with the platen quick lift knob to prevent damage to probe cards by the microscope objectives
  • Rigid microscope bridge: Supports high powered microscopes,laser cutters and MEMS motion analyzers

High performance 200mm (8”) or 150mm (6”) manual probe station
Ideally suited for advanced and general probing and laser cutter use, the Model 8060 manual station has two speed stage control knobs which easily transverse an entire wafer and provide precision positioning. The backlash free manual controls of the 8060 drive the stage directly and are easily accessed from the station front.

The large magnetic stainless steel platen supports a large number of manipulators or high pin count probe cards (with optional probe card holder). The platen is moved to the platen down position by a precise control knob. A fast lift lever is used to raise and lower all manipulators and probe card simultaneously for stage X-Y moves and includes a microscope lift delay control to raise the microscope at the same time. The platen is supported by solid four point support for superior stability and accuracy.

The 8060 features a super stable microscope bridge which can support high powered microscopes, laser cutters and Micro-Motion Analyzers. A microscope up lock is standard. Applications for the High Performance Series include Low Current probing, RF/High Frequency probing, LCD probing, Probe Card probing, Reliability Testing, Thin Film probing, and Process Monitoring.


P Series (200-300)

Accessories and Options

The P series stations have a wide range of accessories and options. Below are some of the most commonly used.

Microscopes:
The P series stations are designed to support a wide range of microscopes. Typically used for analytical probing are Mitutoyo FS70, US Microscope Company, Seiwa, Motic, Thales-Optem A-Zoom, and Sterozoom microscopes. All of these microscopes are available through Micromanipulator. Special versions of microscopes may be required for laser cutting, micro-motion analysis and emission detection systems.

Chucks
Ambient chucks include high isolation stainless steel vacuum chucks with lift pins (9000EVS-12SSLFT) and without lift pins (9000EVS-12SS).

Thermal chuck systems are available with and without lift pins and in coaxial and triaxial versions. Low noise DC or AC power supplies are used depending upon the specific application. The triaxial chuck and DC power supply combination is used for the most demanding low current measurements.

A range of temperatures are available:
From
10 to 15° above room temperature to +300°C  | From 0° to +300°C chiller system | From -55° to +300°C chiller system

Single Die or Wafer Pieces Holder The P series stations may be used with a single die or small wafer pieces vacuum holder. This holder sits on the vacuum chuck and concentrates the vacuum into small vacuum holes on the holder surface. An electrical connection may be made through the station chuck connections and the VAC-PUC.

Control Methods
Joystick control for the P Series Models is standard.

Down-stop control for the P series can be accomplished by using either a contact sense probe (44-8000-CS-1) or a contact sense probe on a probe card.

Computer control can either be through the “OpenDoor™” command set (user programming required) or through the Micromanipulator NetProbe™ software package.

Probe Card Holders
An Adjustable probe card holder (9000-FPC-ADJ12) or top loading probe card holder (9000-FPC-TL) is available to hold cards from 4.5” to 6” (11.4 to 15.2 cm) wide.

Vibration Isolation
Vibration isolation tables are available for the P300J model stations in a variety of sizes and are built into the base of the P200-300A models.

Laser Cutting
The P series station microscope bridges are designed to support the weight of industry standard laser cutters. Micromanipulator distributes the New Wave Research wavelength selectable laser cutters.

Micro-Motion Analysis
The P series station microscope bridges are designed to support the weight of micro-motion analysis systems from Polytec Inc. The bridge design dampens vibrations which may interfere with highly sensitive motion analysis.

Video and Image Enhancement Systems
A number of video systems are available for use with the P series probe stations. These range from independent basic video camera/monitor combinations to video systems integrated with NetProbe™ software to provide advanced control of the station.
A number of image enhancement systems are available which provide real-time processing of video images. These provide advantages especially when very high 200x objectives are used or when low light conditions prevail.

Light/EMI/RFI Enclosures
A number of options are available for light/EMI/RFI shielding. Top-hat assemblies are available to provide shielding for the chuck/stage area with open access to manipulators and the P series station controls. Roll-top Light Tight Enclosures (LTEs)are available for the P300J.

Emission Microscope Systems
The P series probe stations may be used with emission microscope systems such as the Micromanipulator FA-2000™. The massive microscope bridge is designed to support the weight of emission microscopes and cameras.


P200A

Semi-Automatic Probe Station

 

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The P200A probe station is the most stable, intuitive, and space efficient 200mm semi-automatic analytical probe station available today. Designed for low current, sub-micron positioning applications, the P200A comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200A features closed-loop operation with massive stage and platen drives, a robust chuck mount and a harmonic theta drive.

The P200A uses netProbeTM, Micromanipulator’s revolutionary prober control software. Navigator, Inter-active Video, Memory List, Wafer Map and Setup modules provide full functionality with a wealth of high level features including Video Positioning and Snap Alignment, Die to Die and In-Die stepping, and a prober interface that can emulate other station commands.

Joystick control allows for easy and quick operation when programmability is not required. The joystick intuitively operates the station stage, platen (Z), and theta as well as the microscope X-Y and Z drives locally to the probe station hardware.

P200A Control Features and Software Modules:
* Navigator module: Provides complete inter-active navigation control of stage, platen, theta and microscope.
* Wafer Map module provides the wafer map programming and step and repeat functions. Complete edit functions for the map are provided including choice of coordinate orientation. Stepping through the Wafer Map may be triggered by software or an external trigger pulse. For small die, a Zoom Window is provided which shows the die immediately adjacent to the current location.
* Memory module: Store locations by coordinates or by find and save function. The Memory List allows movement to a location with a simple click or programmability to step through all listed locations. Coordinate Memory List stepping programs with Wafer Map to provide Die + In-Die stepping capability.
* The Pattern Recognition function recognizes a sample pattern and aligns to it after each programmed move. Using advanced edge sensing, the module is not “fooled” by contrast alterations or even full light / dark reversals.
* Local control of the station and microscope X-Y-Z and Theta is provided by a high resolution joystick. The joystick features high / low speed selection, linear or log acceleration selection and a lock-out function to prevent movement by accidental knocks during a long term test.

Station specifications:

  • 0.1 micron resolution stage, platen, and microscope drive: Supports probing of the smallest targets
  • Stage 200 x 200mm (X-Y), x 150mm (Z - platen) drive range: Supports wafers / samples up to 200mm
  • Microscope 100 x 100mm (X-Y), x 200mm (Z) drive range: Supports large die and multi-site probe cards
  • Stainless steel platen with 4-point platen leadscrew drive: Supports both magnetic and vacuum base manipulators. The proprietary design of the P200A platen prevents excessive probe movements during large thermal chuck positioning excursions.
  • Integrated dry/dark enclosure: Provides EMF shield and enclosure for low temperature chuck dryness
  • Vacuum quick disconnect and Triaxial strain relief brackets: Provide convenient, strain relieved connections.


Full range of accessories and options available including:
Probe card holders, Thermal Chucks, Video accessories, Manual/Motorized manipulators.

 

P300A

Semi-Automatic Probe Station

The P300A probe station is the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station available today. Designed for low current, sub-micron positioning applications, the P300A comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing. Built for reliability as well as precision, the P300A features closed-loop operation with massive stage and platen drives, a robust chuck mount and a harmonic theta drive.


The P300A uses netProbeTM, Micromanipulator’s revolutionary prober control software. Navigator, Inter-active Video, Memory List, Wafer Map and Setup modules provide full functionality with a wealth of high level features including Video Positioning and Snap Alignment, Die to Die and In-Die stepping, and a prober interface that can emulate other station commands.

Motorized controls placed conveniently at the front of the station allow simple manual control of this semi-automatic station when programmability is not required. Both joystick and MicroTouchTM controls intuitively operate the station stage, platen (Z), and theta as well as the microscope X-Y and Z drives. A local touch-screen display also provides setup and operational programmability locally to the probe station hardware.

P300A Control Features and Software Modules:
* Navigator module: Provides complete inter-active navigation control of stage, platen, theta and microscope.
* Wafer Map module provides the wafer map programming and step and repeat functions. Complete edit functions for the map are provided including choice of coordinate orientation. Stepping through the Wafer Map may be triggered by software or an external trigger pulse. For small die, a Zoom Window is provided which shows the die immediately adjacent to the current location.
* Memory module: Store locations by coordinates or by find and save function. The Memory List allows movement to a location with a simple click or programmability to step through all listed locations. Coordinate Memory List stepping programs with Wafer Map to provide Die + In-Die stepping capability.
* The Pattern Recognition function recognizes a sample pattern and aligns to it after each programmed move. Using advanced edge sensing, the module is not “fooled” by contrast alterations or even full light / dark reversals.
* Local control of the station programming is provided by a high resolution touch-screen. Navigation and setup functions are available with the touch-screen. Data entry is simplified through a pop-up keypad that appears when needed.

Station specifications:

  • 0.1 micron resolution stage, platen, and microscope drive: Supports probing of the smallest targets
  • Stage 300 x 300mm (X-Y), x 150mm (Z - platen) drive range: Supports wafers / samples up to 300mm
  • Microscope 100 x 100mm (X-Y), x 200mm (Z) drive range: Supports large die and multi-site probe cards
  • Stainless steel platen with 4-point platen leadscrew drive: Supports both magnetic and vacuum base manipulators.
    The proprietary design of the P300A platen prevents excessive probe movements during large thermal chuck positioning excursions.
  • Integrated dry/dark enclosure: Provides EMF shield and enclosure for low temperature chuck dryness
  • Vacuum quick disconnect and Triaxial strain relief brackets: Provide convenient, strain relieved connections.


Full range of accessories and options available including:
Probe card holders, Thermal Chucks, Video accessories, Manual/Motorized manipulators.

 

P300J

Manual-Motorized 300 mm Probe Station

 

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The P300J probe station is the most stable, intuitive, and space efficient 300mm analytical probe station available today. Designed for low current, sub-micron positioning applications, the P300J comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing. Motorized controls placed conveniently at the front of the station give a dynamic speed range which supports both precise positioning and long-distance moves. Both joystick and MicroTouchTM controls intuitively operate the station stage, platen (Z), and theta as well as the microscope X-Y and Z drives.

The P300J’s large magnetic stainless steel platen has plenty of room for multiple manipulators and/or a probe card.

The system supports a wide choice of options, and is even backward compatible with accessories (manipulators, probe holders, probe card holders) from our industry-standard 8000 series (200mm) stations.

Accurate laser cuts and stable video images are guaranteed by the P300J’s massive microscope bridge support structure. The station includes an adjustable microscope lift delay which prevents driving the probes into the microscope objective, a feature that Micromanipulator pioneered, and which is a hallmark of our professional probing systems.

Features and Benefits

  • Cast base with vibration isolation interlayer: Provides stability and ruggedness.
  • Station single-point ground: Low current ready.
  • MicroTouchTM controls: Ergonomic in design with super responsive control.
  • Motorized 2-speed stage, theta and microscope drives:Provide ease of use with the choice of speed range for long-distance or precise positioning.
  • Stage/Platen/Theta drive control via MicroTouchTM controls and joystick: Multiple users have their choice of controls to fit their preference.
  • Station joystick includes device select, high/low speed, and “lockout” buttons: Provides full localized control. Lockout prevents inadvertent movement during testing.
  • Stage, Platen, Theta (300 x 300 x 50mm x 15 deg) range: Provides full wafer coverage and flexibility of setup.
  • 0.1 micron resolution stage, platen, and microscope drive: Supports probing of the smallest targets.
  • Stainless steel platen with 4-point platen leadscrew drive:Supports both magnetic and vacuum base manipulators.
  • Integrated dry/dark enclosure: Provides EMF shield and enclosure for low temperature chuck dryness.
  • Removable front wedge: Provides easy access to the chuck for loading and unloading wafers when removed, and support for additional manipulators when in place.
  • Microscope 100 x 100mm (X-Y), x 200mm (Z) drive range: Supports large die and multi-site probe cards.
  • High force chuck/theta post assembly: Supports high pincount probe card pressures.
  • Station plumbed and wired to accept -55 to +300 degree C H1000 series thermal chuck: Set up is clean and clear for fixturing and cabling.
  • Vacuum quick disconnect and Triaxial strain relief brackets: Provide convenient, strain relieved connections.

 

SRP

Service Rebate Program

Micromanipulator's Service Rebate Program (SRP) offers you unparalled value for your service dollar!

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Don't put off servicing your equipment to keep it in top shape! Schedule service work through Micromanipulator now and we will credit the money you spend against the purchase of new systems and accessories from Micromanipulator in the future!

The best of both worlds! Keep your existing equipment in great shape, and secure a discount on future products! It even works with consumables!

Contact Micromanipulator or your local representative for details today! This program won't last forever*

*Subject to change without notice