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photronics
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Photronics/Photonics

Wafer Fabication

IC Assembly

Desk V HP Series Tools

Cold Sputtering Platform
The Desk V HP series is used extensively for sample electron microscope (SEM), transmission electron microscope (TEM) sample preparation and Iridium coating applications. The Desk V HP series includes standard high power systems and turbo pumped systems.

Fast Cycle Times
The pump down - coating - venting cycle completes in less than three minutes.

Protect Samples
Specimens are protected from damage by Denton Vacuum's patented anode grid which collects stray electrons and prevents them from bombarding the sample.

Reduce Contamination
A manual shutter reduces contamination during the etch process

Removable Shutter
The shutter can be removed to accommodate larger substrates

Customer choice of Gold or Gold-Palladium target included with the purchase of a Desk V system.

Desk V HP Brochure (Reqrface to the PLC provides full control for the following modes: service, manual, and semi-automatic. Standard software makes it easy to support and avoid costly customization fees.

Safety interlock mitigate damage to the operator and equipment.

 

Powerful Control System
The touch screen interface to the PLC provides full control for the following modes: service, manual, and semi-automatic. Standard software makes it easy to support and avoid costly customization fees.

Safety interlock mitigate damage to the operator and equipment.

 

Typical Applications

Sputtering

  • Iridium Coating Capabilities
  • Sputtering
  • SEM Sample Preparation
  • TEM Sample Preparation
  • Field Emission (FE) SEM Sample Preparation

 

Standard Features
Desk V HP
6" OD x 6" H Pyrex Chamber
V
6" OD x 6" H Steel Chamber w/ Viewport
85 LPM Mechanical Pump
V
2" Diameter Pedestal
V
0-100 MA Power Supply
V
Pfeiffer 70 L/S Turbo Molecular Pump
Ultimate Pressure < 5E-6 and <10E-6 in 15 Minutes
V
Gold or Gold/Palladium Target
(One included at no charge)
V
Requires Gas (AR Recommended)
Finer Grain Films
Options
Film Thickness Monitor
V
3" Rotating Table
V

4" Rotating Table
(Film Thickness Monitor Not Available with this Option)

V
Carbon Evaporation (Rods or Yarn)
V
Rotating & Tilting Stage
(Etch Mode Not Available with This Option)
V