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photronics
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Photronics/Photonics

Wafer Fabication

IC Assembly

Jelight Company Inc.

UVO Cleaner ®- Ozone cleaning device

The UVO method is a photo-sensitized oxidation process in which the contaminant molecules of photo resists, resins, human skin oils, cleaning solvent residues, silicone oils, and flux are excited and/or dissociated by the absorption of short-wavelength UV radiation. Atomic oxygen is simultaneously generated when molecular oxygen is dissociated by 184.9 nm and ozone by 253.7 nm uv. The 253.7 nm UV radiation is absorbed by most hydrocarbons and also by ozone. The products of this excitation of contaminant molecules react with atomic oxygen to form simpler, volatile molecules which desorbs from the surface. Therefore, when both UV wavelengths are present atomic oxygen is continuously generated, and ozone is continually formed and destroyed. By placing properly pre-cleaned samples within five millimeters of ozone producing UV source, such as the low pressure mercury vapor grid lamp in the UVO-Cleaner ®, near atomically clean surfaces can be achieved in less than one minute. The process does not damage sensitive device structures of MOS gate oxide.

Info

Model : 42

 

UVO Cleaner 42 is the smallest unit by the size as well as the size of the tray. Compact design and a low price. Lamp operation is timer controlled. Two media inlets are located on the back of the unit. This will allow to speed up the cleaning process by supplying the oxygen to the cleaned surface from external source.


Tray dimmensions in inches: 6 x 6 x 1 Listed*

 

Info

Model : 342

 

UVO Cleaner Unit 342 is the variation of 42. Unlike the model 42, 342 has a deeper tray adjustable up to 4 inches in height. Controlled by timer, has 1 pair of media inlet with unrestricted flow that allows to connect external source of gas for purging or speeding up creation of ozone by uv rays.


Tray dimmensions in inches: 6 x 6 x 4 Listed*

 

Info

Model : 144AX

 

UV cleaning machine 144AX is one of our best selling UVO Cleaner units because of its compact design and affordable price which makes it perfect tool for small laboratories. As other listed models unit is equipped with two pair of media inlets with valves controlled by microprocessor.


Tray dimmensions in inches: 12 x 12 x 3 Listed*

 

Info

Model : 5144AX

 

UV cleaning machine 5144AX is a remake of our best selling UVO Cleaner 144AX. As other listed models unit is equipped with two pair of media inlets with valves controlled by microprocessor. The tray has 5 inch adjustable tray depth to accomodate bigger parts.


Tray dimmensions in inches: 12 x 12 x 5 Listed*

 

Info

Model : 256

 

UVO Cleaner 256 initiated major upgrades to our line of UV ozone cleaning devices. It's the one of the most popular and most selling version of UV ozone cleaner available on the market today.


Tray dimmensions in inches: 16 x 16 x 3 Listed*

 

Info

Model : 7576

 

Ozone Cleaner UVO 7576 is one of the top-of-the-line units manufactured here at Jelight. It is very similar to model 576, the very deep drawer will allow you to place bigger components that require ozone cleaning. All other features remain this same.


Tray dimmensions in inches: 24 x 24 x 7 Listed*

 

Info

Model : 384

 

UV cleaner 384 is very similar to unit 576. The difference is the depth of the drawer that allows placing a bigger parts inside a uv exposure chamber. It is equiped with media inlets to allow connecting external source of oxygen to expedite the generation of ozone.


Tray dimmensions in inches: 24 x 16 x 3 Listed*

 

Info

Model : 288A

 

UVO Cleaner 288A had replace 288 which had a timer controlled cycle and a single pair of media inlet with unrestricted flow. It have received additional pair of media inlet, PLC-controlled media flow and UV grid lamp operation. Drawer capacity remain this same.


Tray dimmensions in inches: 24 x 12 x 3 Listed*

 

Info

Model : 576

 

The Ozone Cleaner UVO 576 has a high capacity tray measuring 24 X 24.23". Unit has two pair of media inlets equipped with valves that are directly controlled by Central Processing Unit. This allows faster ozone cleaning by supplying clean oxygen directly to cleaned surface and after cleaning is done flushing the drawer insides with nitrogen. Cleaning time (UV mercury grid lamp operating time) and purging time can be set independently.


Tray dimmensions in inches: 24.23 x 24 x 3 Listed*

 

 

Model

Cleaning tray size

Housing dimmension

Power requirements

 
Width
Depth
Max Height Adjustment
Width
Depth
Height
Voltage
Frequency
144AX
12
12
3
16
24
11
100-120
60
144AX-220
12
12
3
16
24
11
200-240
50
256
16
16
3
20
28
11
100-120
60
256-220
16
16
3
20
28
11
200-240
50
288A
24
12
3
28
24
11
100-120
60
288A-220
24
12
3
28
24
11
200-240
50
342
6
6
4
8
13
10
100-120
60
342-220
6
6
4
8
13
10
200-240
50
384
24
16
3
28
28
11
100-120
60
384-220
24
26
3
28
28
11
200-240
50
42
6
6
1
8
13
8
100-120
60
42-220
6
6
1
8
13
8
200-240
50
5144AX
12
12
5
16.3
28
14
100-120
60
576
24.23
24
3
28
36
11
100-120
60
576-220
24.23
24
3
28
36
11
200-240
50
7576
24
24
7
28
36
15
100-120
60
7576-220
24
24
7
28
36
15
200-240
50

 

ADVANTAGES OF UVO CLEANER ®

UVO cleaning is a damage free alternative. Jelight's UVO-Cleaner ® is completely manufactured from polished stainless steel, and is equipped with a digital timer to control UV exposure time. The UVO-Cleaner ® also features an automatic shut-off switch to prevent accidental exposure to UV. Ozone concentration and the distance between the sample and the UV source can greatly affect the cleaning rate. Jelight's UVO- Cleaner ® has a high intensity low pressure mercury vapor UV grid lamp for optimum generation of atomic oxygen, ozone, and short-wave UV radiation for effective cleaning. To maximize the cleaning rate, parts to be cleaned are placed on an adjustable tray. The unit is also equipped with inlet ports for oxygen or other gas media, and an exhaust port for hookup to the exhaust system.

APPLICATONS

·         Substrate UV cleaning prior to thin film deposition. Descuming and stabilizing photoresist. Hermetic sealing in ultrahigh vacuum.

·         Cleaning of silicon wafers ,lenses, mirrors, solar panels, cold rolled steel, inertial guidance subcomponents, and GaAs wafers.

·         Cleaning of flux, hybrid circuits, and flat panel LCD.

·         Etching Teflon, Viton, and other organic materials.

·         Enhancing oxide passivated surfaces of GaAs and Si.

·         Enhance outgassing of glass.

·         Wafer tape removal.

·         Improve adhesion of coatings on plastics.

·         Ink removal from wafers after testing.

·         Stripping photoresist.

·         Removing latent images from lithography plates.

·         Cleaning lithography plates.

·         Growing oxide layers on silicon wafers.

·         Cleaning circuit boards prior to packaging/adhesion.

·         Increase hydrophilic characteristics of surfaces.

·         UV Cleaning and sterilization for bioscience applications.

·         Optical fibers / optical glass lenses.

·         Cleaning electronic microscope probes.

·         Microscope slides.

 

 

UV Ozone cleaners equipment and accessories.

 

Replacement mercury grid lamp

By using the Suprasil UV lamp, which transmits 90 percent of 184.9nm wavelength compared to the standard fused quartz lamp which transmits only 65 percent of the 184.9nm, cleaning rates can be substantially enhanced. With a higher percentage of 184.9nm radiation, the UV cleaning process is more effective as more ozone is being generated on the surface of the lamp.

 

Mercury grid lamp
 
Ozone killer - uv ozone cleaner exhaust

Ozone Killer

What is an ozone killer?

An Ozone Killer unit is available for dissociating trace amounts of ozone in the exhaust. The unit can easily be hooked up to any exhaust system and the UVO-Cleaner®. A Blower unit to be attached to the outlet of the Ozone Killer to augment exhaust flow rate.